Laboratory for Advanced Materials Processing

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• Gold etchant: Transene TFA

        Etch rate at room temp = 28 ang/sec = 0.168 microns/min 
  	

• Chromium etchant: Transene CE-1020

        Etch rate at 40 C  = 50 ang/sec = 0.3 microns/min
  	

• Aluminum etchant: Transene Aluminum Etchant Type A

        Etch rate at room temp = 10 ang/sec = 0.06 microns/min
                  at 40 C = 80 ang/sec = 0.48 microns/min